Micro-Epsilon: Confocal 3D Sensor Measures Complex Surfaces
The new ConfocalLine CLI8500 confocal-chromatic line sensor from Micro-Epsilon detects fine structures on matte, highly reflective, and transparent surfaces. 3D evaluation takes place directly within the sensor.
With the ConfocalLine CLI8500 confocal-chromatic line sensor, Micro-Epsilon is opening a new chapter in 3D measurement technology: maximum precision, exceptionally high point density, and impressive dynamic range in a compact system. With 2,624 measurement points per profile and a Z-resolution of 0.2 µm, the ConfocalLine CLI8500 reliably captures even the finest structures with exceptional detail. Large tilt angles further expand its range of applications for complex geometries and challenging surfaces. The confocal-chromatic measurement principle enables precise measurements on matte, highly reflective, and transparent surfaces. Since only the focused wavelength is evaluated, the measurement results remain largely independent of material color and surface texture. As a result, the ConfocalLine CLI8500 opens up a wide range of applications, from the semiconductor industry to electronics and battery production, as well as mechanical engineering and medical technology. The new sensor series thus combines the highest precision with the speed and flexibility of modern industrial 3D measurement technology.
Next-Generation 3D Measurement Technology
As the most compact confocal-chromatic line sensor in its class, the CLI8500 offers a large measurement range of 7 mm despite its small size. Data evaluation takes place directly within the sensor, thereby reducing system complexity and data load. In SMART mode, measurement programs are stored directly on the sensor and executed autonomously, allowing finished measurement results to be output without the need for an additional evaluation computer. Interfaces such as Profinet, EtherCAT, EtherNet/IP, as well as GenICam and GigE Vision, support flexible integration into automation and machine vision systems. With a Z-axis resolution of 0.2 µm, the CLI8500 reliably captures the finest structures, narrow edges, and the smallest steps. At the same time, the sensor achieves a measurement frequency of up to 2 kHz across the entire usable measurement range. The large tilt angle of up to ±80° along the line also enables stable measurements on inclined or complex-shaped components.
Contact details and information on the companies and institutions presented here can be found in our interactive surface technology industry directory.