Singulus Technologies: Vacuum coating system for Wika
Singulus Technologies equips Wika Alexander Wiegand with a Generis PECVD inline system for the deposition of electrical insulation and passivation layers. The ultra-modern plasma technology is used specifically for applications in the field of sensor technology.
Wika Alexander Wiegand SE & Co KG, Klingenberg, is a global leader in pressure and temperature measurement technology. Singulus' PECVD technology (Plasma Enhanced Chemical Vapor Deposition) enables high-quality, thin layers to be applied in an inline process. Especially in the case of high-precision sensor components, the deposition of electrically insulating and protective layers contributes significantly to increased performance and longevity.
For Generis PECVD, Singulus relies on proven inductively coupled linear plasma sources (ICP) developed in-house. This process is characterized by a high electron and activation density combined with low ion energy. It enables very high deposition rates over large substrate widths, whereby the combination of linear plasma source and inline process in particular offers a high degree of scalability while maintaining exceptional layer qualities - with wide process windows, minimal substrate damage and a low CO2 footprint. Generis PECVD technology thus fulfills the highest requirements for efficiency and precision and offers ideal conditions for demanding markets such as the semiconductor industry, medical technology, the automotive industry and industrial metrology.