Vacuum Technology

Vacuum technology refers to all processes and systems used to generate and maintain a defined negative pressure. In surface engineering, it creates controlled process conditions by removing interfering gases, moisture, and contaminants from the process chamber. This enables the production of coatings with high purity, uniform film thickness, and reproducible properties.

Among the most important applications of vacuum technology are physical and chemical vapor deposition processes such as PVD (Physical Vapor Deposition) and CVD (Chemical Vapor Deposition). These are used, among other things, to produce wear-resistant hard coatings, decorative coatings, optical coatings, and functional surfaces in the electronics, medical technology, and automotive industries. Processes such as plasma cleaning, plasma activation, or the drying of sensitive components are also frequently carried out under vacuum conditions.

The required vacuum level depends on the specific application. While some processes operate in a rough vacuum, high-quality thin-film processes require high or ultra-high vacuum. The lower the residual gas pressure, the fewer unwanted particles are present in the process chamber, and the higher the coating quality generally is. Modern vacuum systems consist of a vacuum chamber, various pumping systems, measurement and control technology, and often plasma or evaporation sources. Depending on the process, rotary vane, screw, turbomolecular, cryogenic, or diffusion pumps are used. Sensors continuously monitor the pressure and enable precise control of the process conditions.

Vacuum technology is now a key technology in surface engineering. It enables the cost-effective production of high-performance coatings with precisely defined properties and forms the basis for numerous industrial manufacturing processes—ranging from tool coatings and optical components to batteries, semiconductors, and medical implants.