Auger electron spectrometry (AES)

Auger electron spectrometry (AES) is a surface analysis technique that is widely used in materials science and surface chemistry. This method makes it possible to investigate the chemical composition of surfaces at an atomic level. Auger electron spectrometry measures the characteristic Auger electrons that occur when holes are created in the inner electron shells of an atom.

AES is particularly suitable for analyzing thin layers and surfaces, as it provides high-resolution information about the elemental composition. This technique makes it possible to identify and quantify the surface composition of materials, providing insights into the chemical processes and properties at the atomic level.

In research and industry, Auger electron spectrometry is used in various fields, including materials science, semiconductor technology, surface coatings and nanotechnology. Through the precise analysis of surfaces, AES enables the optimization of materials and processes in numerous applications, from the development of semiconductor devices to the characterization of thin films in surface technology.