Busch Group with joint trade fair appearance at Semicon West

At Semicon West, the Busch Group will be presenting vacuum technology and exhaust gas purification systems to support semiconductor fabs and sub-fabs. The Busch Group's booth message this year is "Ultimate Product Range" and "Total Fab Solutions". Turgay Ozan, Managing Director of Busch Vacuum Solutions and Pfeiffer Vacuum in the USA, explains: "We are uniquely positioned as a leading partner for total solutions in the semiconductor industry. Our extensive product range offers support from cleanrooms to sub-fabs. It includes exhaust gas cleaning systems, vacuum pumps, contamination management, leak detection, valves, sub-fab management and service for all brands." The product portfolio for vacuum technology and exhaust gas cleaning solutions at the trade fair includes the ASM 392 leak detector: The ASM 392 from Pfeiffer Vacuum is semi-S2-compliant. With its integrated turbomolecular vacuum pump for fast evacuation and short response times, it is ideal for large test objects. Thanks to its oil-free and non-contact backing pump together with the powerful high vacuum pump, it is ideal for testing in clean room environments. Pfeiffer Vacuum's new Series E solenoid valve will be presented for the first time at a trade fair: an electric angle valve developed for easy integration into high vacuum applications. The Series E combines advanced electric actuation with energy efficiency. As a result, the valves offer excellent control, reliability and cost savings.

The ATH 2804 M turbopump will also be on display. With its small size, the magnetically levitated ATH 2804 M turbopump from Pfeiffer Vacuum offers high gas throughput and is perfect for semiconductor manufacturing processes. The HiPace 3400 IT turbopump was specially developed for demanding ion implantation applications and sets standards as the most compact turbopump in its class. The DN 320 flange size increases the pumping speed for process gases by 30 percent. Its unique bearing concept and coated rotor design protects both the process and the pump and offers durability and reliability. The TORRI BD 0100/0600 oil-free pumps from Busch Vacuum Solutions offer short pump-down times for lock chambers. They are among the smallest, lightest and most energy-efficient oil-free multistage rotary lobe vacuum pumps on the market. The thermal exhaust gas cleaning system CT-TW-H from Centrotherm Clean Solutions combines the advantages of combustion with the electrically heated concept of exhaust air treatment. This results in lower operating costs and fewer secondary emissions. Visitors to Semicon West can meet experts from Busch Vacuum Solutions, Pfeiffer Vacuum and Centrotherm Clean Solutions at booth 733 in the South Hall of the Moscone Center in San Francisco from July 9 to 11, 2024.