Micro-Epsilon: Inline coating thickness measurement of thin films

The new white light interferometer "Interferometer IMS5200-TH" from Micro-Epsilon is designed for fast, high-precision inline measurements. It measures coating thicknesses from 1 to 100 µm with nanometer accuracy and excellent linearity of <± 100 nm. In addition, multi-peak measurement of up to five thin layers is possible. The measuring rate can be infinitely adjusted in the range from 100 Hz to 24 kHz. Thanks to the stored material selection list, it offers maximum flexibility in use. It is not necessary to teach in the material separately. The IMS5200-TH can be used for a wide range of applications, from air gap measurement on glass wafers and masks to testing the coating processes of beverage cartons and paint thickness testing in the metal industry. Sectors such as semiconductor production, the metal and steel industry or the packaging industry in particular benefit from the new interferometer series from Micro-Epsilon. The sensor and controller are matched and calibrated to each other at the factory, enabling air gap and coating thickness measurements with nanometer accuracy. Due to the compact and robust sensor design, combined with a large working range of ± 2 mm, the sensor can even be installed in confined spaces.

Micro-Epsilon white light interferometers are easy to integrate

For seamless integration into modern networks, Micro-Epsilon offers Ethernet, EtherCAT and RS422 as well as advanced encoder connections and digital I/Os. Thanks to versatile interfaces, measured values can be efficiently processed via existing analog outputs and flexibly integrated into existing automation systems. With protection class IP40 (controller) and IP65 (sensor) and usable in a temperature range of +10 to +50 °C, the sensors are adapted to industrial environments. They can also be used in special environments such as clean rooms and vacuums. Even under high shock or vibration loads, the interferometer ensures consistently high measurement results. Compared to conventional interferometers, Micro-Epsilon white light interferometers can be easily commissioned and parameterized via a web interface, which means that no additional software needs to be installed.